4/10/2006
3:30pm-4:30pm
DLC 1B70
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Computer Aided Design of Micro-Electro-Mechanical Systems: Eigenvalues, Energy Losses, and Dick Tracy Watches
University of California, Berkeley
Resonant Micro-Electro-Mechanical Systems (MEMS) can be used as sensors,
frequency references, and filters. Surface-micromachined resonators currently
under development can be integrated with circuitry, so that soon a "cell phone
on a chip" may be possible. For these resonators to be useful for such radio
applications, engineers need to understand and minimize the amount of damping
in the system. In this talk, we discuss the numerical modeling of damping
mechanisms for high-frequency resonant MEMS, and describe how the mathematical
structure of the numerical models can be used to make fast algorithms for modal
analysis and for the construction of reduced-order models. We then describe
HiQLab, a simulation package designed to study resonant MEMS. Using HiQLab,
we predicted a previously-unknown mode interference phenomenon which causes
substantial variation in the quality of certain high-frequency disk resonators.
We explain the reason for this phenomenon, and compare our simulated results
to measured data.
Hosted by Henry Tufo.
The speaker is a candidate for a faculty position in the Department of Computer Science.
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